KrF excimer laser lithography of PVP-DPT resist.
نویسندگان
چکیده
منابع مشابه
Characterisation of dentin surfaces processed with KrF excimer laser radiation.
In the present work, the surface microtexture and chemical changes induced in human dentin by laser processing with KrF excimer laser radiation using fluences ranging from 0.5 to 20 J/cm2 were studied by SEM, XPS and FTIR. Two distinct behaviours were observed in the evolution of surface topography. In some samples, the laser-treated surface remained flat, independently of the fluence used. It ...
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The electrical and optical characteristics of GaN:Mg irradiated by a pulsed KrF ~248 nm! excimer laser have been studied. When an as-grown Mg-doped GaN film was irradiated by an excimer laser at an energy density of 590 mJ/cm in a nitrogen atmosphere, the hole concentration was drastically increased up to 4.42310 cm. Furthermore, a GaN:Mg thin film, which was treated by laser irradiation follow...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1991
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.4.415